The P-732.ZC is a fast, high-resolution vertical positioning stage with direct metrology. Providing subnanometer resolution, less than 2 milliseconds settling time and a straightness of motion of better than 10 µrad, the stage is ideally suited for scanning microscopy applications. In combination with the P-733 100 x 100 µm XY stage it becomes a compact XYZ positioning and scanning stage with excellent dynamic performance in the vertical direction.

Features

• High Stiffness for High-Dynamics Operation
• Up to 15 µm Vertical Travel Range
• <1 nm Resolution
• Straightness of travel <10 µrad
• Clear Aperture with 25 mm Diameter

Superior Accuracy Through Direct-Motion-Metrology Capacitive Feedback Sensors
P-732.ZCs are equipped with non-contact, zero-friction, direct-measuring, two-plate capacitve position sensors. Unlike conventional, indirect sensors (such as strain gauge / piezo resistive sensors), they measure the position directly rather than the strain in the actuator or guiding system.

Capacitive sensors are absolute-measuring, high-bandwidth devices and show none of the periodic errors found in incremental encoders. This permits motion linearity of better than 0.01% and effective resolution in the sub-nanometer range. This technique, combined with the inherent precision of the PI two-plate capacitive sensors and the temperature-compensated design, results in higher-linearity scans, and provides superior responsiveness, resolution, repeatability and stability.

Superior Lifetime
Reliability is assured by the use of award-winning PICMA® multilayer piezo actuators, which are integrated into a sophisticated, single-module, flexure guiding system. PICMA® actuators are the only ceramic-encapsulated actuators on the market, making them far superior to conventional actuators in lifetime and performance. The FEA-modeled flexures are wire-EDM-cut for superior guiding precision. In addition they are maintenance-free and not subject to wear.