The Magellan™ XHR SEM family of scanning electron microscopes (SEM) enables scientists and engineers to quickly see things they could not see before: highly-sensitive surface images, looking top-down or at an angle, and at resolutions below one nanometer. This important breakthrough in electron microscopy is made possible thanks to the revolutionary monochromatized gun of the Magellan™ XHR SEM column, which enables microscopists to associate high spatial resolution with very shallow beam penetration. The Magellan™ XHR SEM family of scanning electron microscopes (SEM) extends the range and capabilities of traditional nanoscale SEM imaging and analysis with the speed and ease-of-use of a traditional scanning electron microscope (SEM), with no restriction to sample size.

Features

• Subnanometer resolution from 1 kV to 30 kV with uncompromised stability and beam currents to up to 20 nA
• Innovative electron optics, including FEI’s patented UniColore (UC) technology that enables an energy spread of less than 0.2 eV
• High throughput and fast ‘time to answer’ by performing material and defect analysis on a single tool
• Landing energies down to 50 V for surface sensitive high resolution imaging
• High precision, high stability stage, offering XHR imaging on the complete surface of a 100 x 100mm sample, in a large analytical chamber
• No compromises in sample size, shape, composition, preparation
• Application versatility that includes analysis and prototyping
• Simple and easy to use, as any SEM should be