X'Pert³ MRD XL Materials Research X-ray Diffraction System from Malvern Panalytical

The X’Pert³ MRD-XL Materials Research Diffractometer is the system of choice for high resolution diffraction and scattering analysis of wafers up to 300mm in diameter. It handles a wide variety of X-ray scattering methods, including high resolution diffraction, in-plane diffraction, reflectivity, thin film phase analysis, wafer mapping, GISAXS, stress, texture and nonambient analysis. The X’Pert³ MRD features the highest resolution goniometer with Heidenhain encoders for lightening fast positioning, a 5 axis cradle allowing for support and mapping of wafers up to 6 inches in diameter, and a wide variety of advanced optics and detectors, including the PIXcel3D for fast reciprocal space mapping. The X’Pert³ MRD-XL also offers a sophisticated, automatic wafer loader option that enables the X'Pert³ MRD XL to function as an 'in-wall' system, with the wafer being loaded from a clean room environment and placed on to a self-centered wafer holder.