Park Systems XE-HDM is an automatic defect review AFM that speeds and improves the way defects in HDD substrates and media are identified, scanned, and analyzed.
Features
- Artifact Free Metrology by Crosstalk Elimination
- Unique decoupled XY scanning system provides a flat scanning stage
- Flat and linear XY scan removes artifacts from background curvature
- Accurate feature measurements with industry leading gauge statistics
- Superior tool to tool matching
True Non-Contact ModeTM and Longer Tip Life Reduces Cost of Ownership10 times or longer tip life for general purpose & defect imaging
Less tip wear for prolonged high-quality and high-resolution imaging
Minimized sample damage or modification
Immunity from parameter-dependent results observed in tapping imaging
Automatic Defect Review for Media and SubstratesAutomated survey scan of defects mapped by optical inspection tools
Automated zoom-in scan of specified defects
Automated profiling of imaged defect types
Automated analysis of imaged defects
HGA fixture and sample tilting stage (optional)
Nanotechnology Solutions PartnerTrusted partnership with customers to meet the fast changing requirements
Application specific solutions that maximize throughput
Modular software and hardware platform enable rapid response