High Vacuum Pumps / Turbomolecular Pump

There are various types of mechanical pumping systems that achieve high vacuums and provide years of reliability. However, to create extremely high vacuums in extreme temperature conditions, such as required in high energy physics, plasma or nanotech applications, a turbomolecular pump (or high vacuum pump) may be necessary. These types of high vacuum pumps achieve rotational speeds of up to 80,000 rpms, with total pressures lower than 1x10^-10 mbar and compression ratios of 1x10^11. Turbomolecular pumps are designed to be oil and contaminant-free, for over 250,000 operational hours. High vacuum pumps can be designed with specific uses in mind. For example, a turbomolecular pump designed for thin film deposition will be optimized for moving argon gas, which is typically used in this instance.

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Turbo-V 1001 Navigator Turbomolecular Pump
  • Pump Speed: 790 to 1050 L/sec (depending on flange and gas)
  • Compression Ratio: 1 x 109 (N2), 1 x 107 (He), 1 x 106 (H2)
  • Ultimate Pressure: < 1 x 10-10 mbar
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Turbo-V 2K-G Turbomolecular Pump

Turbo-V 2K-G Turbomolecular Pump

Agilent Technologies

  • Pump Speed: 1600 L/sec (N2)
  • Compression Ratio: 3 x 105 (N2)
  • Ultimate Pressure: < 1 x 10-8 mbar
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  • Pump Speed: 200 to 280 L/sec (depending on flange and gas)
  • Compression Ratio: 7 x 108 (N2), 1 x 105 (He), 1 x 104 (H2)
  • Ultimate Pressure: Mechanical: < 5 x 10-10 mbar, Dry: < 5 x 10-9 mbar
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Turbo-V 3K-G Turbomolecular Pump

Turbo-V 3K-G Turbomolecular Pump

Agilent Technologies

  • Pump Speed: 1900 to 2200 L/sec (depending on gas)
  • Compression Ratio: > 1 x 107 (N2:), 6 x 103 (He), > 1 x 108 (Ar)
  • Ultimate Pressure: < 1 x 10-8 mbar
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Turbo-V 81 Turbomolecular Pump

Turbo-V 81 Turbomolecular Pump

Agilent Technologies

  • Pump Speed: 46 to 77 L/sec (depending on flange and gas)
  • Compression Ratio: 5 x 108 to 7 x 103 or >7 × 106 to 3 × 102 (depending on gas)
  • Ultimate Pressure: < 1 x 10-10 mbar, or < 1 x 10-9 mbar
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Turbo-V TwisTorr Pump

Turbo-V TwisTorr Pump

Agilent Technologies

  • Pump Speed: 580 to 2050 L/sec (depending on model and gas)
  • Compression Ratio: 2.5 x 106 to 1 x 1011 (depending on model and gas)
  • Ultimate Pressure: < 1 x 10-10 mbar
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