Scanning Electron Microscopes (SEM)

A scanning electron microscope (also commonly abbreviated as SEM) uses beams of electrons to create magnified images of samples, as opposed to beams of light that a traditional microscope uses. Because the scanning electron microscope can magnify a sample up to 500,000 times its normal size and determine its chemical makeup, scanning electron microscopes have a wide range of applications. They are used for quality control in both the pharmaceutical and semiconductor industries, sample comparisons in forensics, diagnostics in medical labs, and in research labs to determine the composition of samples treated in different ways. Scanning electron microscopes have different kinds of signal detectors available that include back-scattered electrons (for imaging), characteristic X-rays (for determining types and amounts of elements present in the sample), transmitted electrons, and cathodoluminescence. Other variations in different scanning electron microscopes include availability of low or high vacuum mode and imaging options for bright field samples and/or dark field samples.

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ASPEX EXplorer Scanning Electron Microscope
  • Type: Microanalysis, High Vac and Variable Pressure
  • Resolution: 135 eV (EDX)
  • Total Magnification: Inquire
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ASPEX EXpress<sup>x</sup> Scanning Electron Microscope
  • Type: Time-critical Microanalysis, High-Vac and Low-Vacuum Variable Pressure
  • Resolution: 130 eV (EDX), 30 nm (Image)
  • Total Magnification: Inquire
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ASPEX EXtreme Scanning Electron Microscope
  • Type: SEM/EDX, Microanalysis
  • Resolution: Inquire
  • Total Magnification: Inquire
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AURIGA CrossBeam Workstation (FIB-SEM)

AURIGA CrossBeam Workstation (FIB-SEM)

Carl Zeiss Microscopy, LLC

  • Type: Analytical, FIB-SEM
  • Resolution: SEM (GEMINI column): 1.0 nm (@ 15 kV) or 1.9 nm (@ 1 kV); FIB (@ 30 kV): < 2.5 nm (Cobra column) or < 7 nm (Canion column)
  • Total Magnification: 12x to 1000kx (SEM) or 300x to 500kx (FIB)
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EVO HD Scanning Electron Microscope

EVO HD Scanning Electron Microscope

Carl Zeiss Microscopy, LLC

  • Type: Analytical, Variable Pressure
  • Resolution: 1.9 to 10 nm (depending on acceleration voltage)
  • Total Magnification: < 5x to 1,000,000x
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EVO LS Series Scanning Electron Microscopes

EVO LS Series Scanning Electron Microscopes

Carl Zeiss Microscopy, LLC

  • Type: Analytical, Variable Pressure
  • Resolution: 3 to 20 nm (depending on acceleration voltage and system configuration)
  • Total Magnification: < 7x to 1,000,000x (LS 10) or < 5x to 1,000,000x
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EVO MA Series Scanning Electron Microscopes

EVO MA Series Scanning Electron Microscopes

Carl Zeiss Microscopy, LLC

  • Type: Analytical, Variable Pressure
  • Resolution: 3 to 20 nm (depending on acceleration voltage)
  • Total Magnification: < 7x to 1,000,000x (MA 10) or < 5x to 1,000,000x
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MERLIN Field Emission Scanning Electron Microscopes
  • Type: Analytical, FE
  • Resolution: 0.6 to 3.0 nm (depending on acceleration voltage and system configuration)
  • Total Magnification: 12x to 2,000,000x (SE mode) or 100x to 2,000,000x (with EsB detector)
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SIGMA Field Emission Scanning Electron Microscopes
  • Type: Analytical, FE
  • Resolution: 1.3 to 2.8 nm (depending on acceleration voltage and model)
  • Total Magnification: 12x to 1,000,000x
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SUPRA Series Field Emission Scanning Electron Microscopes
  • Type: Analytical, FE
  • Resolution: 1.0 to 2.0 nm (depending on acceleration voltage, system configuration and model)
  • Total Magnification: 12x to 1,000,000x
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ULTRA Series Field Emission Scanning Electron Microscopes
  • Type: Analytical, FE
  • Resolution: 0.8 nm (@ 30 kV - STEM mode), 0.8 nm (@ 15 kV) or 1.6 nm (@ 1 kV)
  • Total Magnification: 12x to 1,000,000x (SE mode) or 100x to 1,000,000x (with EsB detector)
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NB5000 nanoDUE'T FIB-SEM

NB5000 nanoDUE'T FIB-SEM

Hitachi High Technologies America, Inc.

  • Type: FIB-SEM
  • Resolution: FIB: 5 nm (@ 40 kV); SEM: 1.0 nm (@ 15 kV)
  • Total Magnification: FIB: 60x to 250,000x; SEM: 70x to 2000x (LM mode) or 250 to 800,000 (HM mode)
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S-3400N Fully Automated VP SEM

S-3400N Fully Automated VP SEM

Hitachi High Technologies America, Inc.

  • Type: Variable Pressure
  • Resolution: 3.0 or 4.0 nm
  • Total Magnification: Inquire
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S-3700N Ultra Large VP-SEM

S-3700N Ultra Large VP-SEM

Hitachi High Technologies America, Inc.

  • Type: Variable Pressure
  • Resolution: 3.0 or 4.0 nm
  • Total Magnification: 5x to 300,000x
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SU-70 UHR Schottky (Analytical) FE-SEM

SU-70 UHR Schottky (Analytical) FE-SEM

Hitachi High Technologies America, Inc.

  • Type: UHR, Analytical, FE
  • Resolution: 1.0 (at 15 kV) or 1.6 nm (at 1 kV)
  • Total Magnification: 20x to 800,000x
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SU1510 Variable Pressure SEM

SU1510 Variable Pressure SEM

Hitachi High Technologies America, Inc.

  • Type: Variable Pressure
  • Resolution: 3.0 or 4.0 nm
  • Total Magnification: Inquire
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SU3500 Premium VP-SEM

SU3500 Premium VP-SEM

Hitachi High Technologies America, Inc.

  • Type: Analytical
  • Resolution: 7 nm at 3 kV (SE),10 nm at 5 KV (BSE)
  • Total Magnification: 5 × 300,000x (photo) ; 7 × 800,000x (display)
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SU6600 Analytical VP FESEM

SU6600 Analytical VP FESEM

Hitachi High Technologies America, Inc.

  • Type: Analytical, Variable Pressure
  • Resolution: 1.2 or 3.0 nm
  • Total Magnification: Inquire
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SU8000 Series UHR Cold-Emission FE-SEM

SU8000 Series UHR Cold-Emission FE-SEM

Hitachi High Technologies America, Inc.

  • Type: UHR, FE-SEM
  • Resolution: 1.3 nm at 1.0kV
  • Total Magnification: 20 to 25,000x (Low mag mode), 100 to 2,000,000x (High mag mode)
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SU9000 UHR FESEM

SU9000 UHR FESEM

Hitachi High Technologies America, Inc.

  • Type: UHR, FE-SEM
  • Resolution: STEM: 0.34 nm (30 kV, sample height 0.0 mm, Lattice Image); SE: 0.4 nm (30 kV, sample height 1.0 mm, 800 kx) or 1.2 nm (1 kV, sample height 2.0 mm, 250 kx)
  • Total Magnification: LM Mode: 80x to 10,000x (on Photo) or 220x to 25,000x (on Display); HM Mode: 800x to 3,000,000x (on Photo) or 2200x to 8,000,000x (on Display)
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TM3000 Tabletop Scanning Electron Microscope

TM3000 Tabletop Scanning Electron Microscope

Hitachi High Technologies America, Inc.

  • Type: Tabletop
  • Resolution: Inquire
  • Total Magnification: 15x to 30,000x (Digital Zoom to 120,000x)
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JCM-5000 NeoScope Benchtop Scanning Electron Microscope
  • Type: Analytical, Benchtop
  • Resolution: 25 nm
  • Total Magnification: 10x to 20,000x
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Phenom G2 pro Desktop Scanning Electron Microscope
  • Type: Scanning
  • Resolution: 25 nm
  • Total Magnification: 20 to 45,000x
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Phenom G2 pure Scanning Electron Microscope
  • Type: Scanning
  • Resolution: 30 nm
  • Total Magnification: 20 to 17,000x
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Phenom ProX Desktop Scanning Electron Microscope
  • Type: Analytical, X-ray Analysis
  • Resolution: 25 nm (at 10 kV)
  • Total Magnification: 80 to 45,000x
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Phenom proX Desktop SEM with integrated Elemental mapping and Line Scan
  • Type: Analytical, X-ray Analysis, Integrated Elemental mapping, Line Scan
  • Resolution: 25 nm (at 10 kV)
  • Total Magnification: 20 to 45000x
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Magellan XHR Scanning Electron Microscope
  • Type: Analytical Scanning
  • Resolution: 0.8 nm (15 kV in SE mode), 0.9 nm (1 kV in SE mode) and 1.5 nm (200 V in SE mode)
  • Total Magnification: Inquire
Inquire
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Combined SEM/FIB/AFM System

Combined SEM/FIB/AFM System

Nanonics Imaging Ltd

  • Type: Atomic force microscopy/Scanning Tunneling Microscopy
  • Resolution: Inquire
  • Total Magnification: Inquire
Inquire
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INDUSEM Scanning Electron Microscope
  • Type: Analytical, Variable Pressure
  • Resolution: SE: 3 nm (30 kV) or 8 nm (3 kV); Low Vacuum (BSE): 3.5 nm (30 kV)
  • Total Magnification: Inquire
Inquire
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LYRA 3 GM Nanotechnology FIB-FESEM Workstation
  • Type: Analytical, FIB-SEM, FE
  • Resolution: Inquire
  • Total Magnification: Inquire
Inquire
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LYRA 3 XM Focused Ion Beam Field Emission Scanning Electron Microscopes (FIB-FESEM)
  • Type: FIB-SEM, FE, Micro-analytical, High Vacuum / Variable Pressure
  • Resolution: SEM Column (SE): 1.2 nm (at 30 kV); FIB Column (SE): <5 nm (at 30 kV)
  • Total Magnification: 2x to 1,000,000x
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MIRA 3 LM Field Emission Scanning Electron Microscopes (FESEM)
  • Type: Analytical, FE, High Vacuum / Variable Pressure
  • Resolution: In-Beam SE: 1 nm (at 30 kV) or 1.8 nm (at 1 kV); SE-ET: 1.2 nm (at 30 kV) or .5 nm (at 3 kV); Low Vacuum (LVSTD): 1.5 nm (at 30 kV) or 3 nm (at 3kV)
  • Total Magnification: 3.5x to 1,000,000x
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MIRA 3 XM Field Emission Scanning Electron Microscopes (FESEM)
  • Type: Analytical, FE, High Vacuum / Variable Pressure
  • Resolution: In-Beam SE: 1.0 nm (at 30 kV) or 1.8 nm (at 1 kV); SE-ET: 1.2 nm (at 30 kV) or 2.5 nm (at 3 kV); High/Low Vacuum (BSE): 2.0 nm (at 30 kV)
  • Total Magnification: 2x to 1,000,000x
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VEGA 3 LM Analytical Scanning Electron Microscopes (SEM)
  • Type: Analytical, High Vacuum / Variable Pressure
  • Resolution: SE: 2 or 3 nm (at 30 kV), 5 or 8 nm (at 3 kV); Low Vacuum (BSE, LVSTD): 2.5 or 3.5 nm (at 30 kV)
  • Total Magnification: Inquire
Inquire
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VEGA 3 SB Analytical Scanning Electron Microscopes (SEM)
  • Type: Analytical, High Vacuum / Variable Pressure
  • Resolution: SE: 3 nm (at 30 kV) or 8 nm (at 3 kV); Low Vacuum (BSE, LVSTD): 3.5 nm (at 30 kV)
  • Total Magnification: Inquire
Inquire
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VEGA 3 XM Analytical Scanning Electron Microscopes (SEM)
  • Type: Analytical, High Vacuum / Variable Pressure
  • Resolution: SE: 2 or 3 nm (at 30 kV), 5 or 8 nm (at 3 kV); Low Vacuum (BSE): 2.5 or 3.5 nm (at 30 kV)
  • Total Magnification: Inquire
Inquire
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VELA 3 XM Focused Ion Beam Scanning Electron Microscopes (FIB-SEM)
  • Type: Micro-analytical, High Vacuum / Variable Pressure
  • Resolution: SEM Column (SE): 3.5 nm (at 30 kV); FIB Column (SE): <5 nm (at 30 kV)
  • Total Magnification: 2x to 1,000,000x
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