Spectroscopic Ellipsometer / Ellipsometers

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Auto SE Simple Thin Film Measurement Spectroscopic Ellipsometer
  • Wavelength Range: 440 to 850 nm
  • Optical Resolution: 2 nm
  • Film Thickness: Inquire
  • Accuracy: NIST 100 nm d +/- 4A, n(632.8nm) +/- 0.002
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Smart SE Spectroscopic Ellipsometer
  • Wavelength Range: 450 to 1000 nm
  • Optical Resolution: better than 3 nm
  • Film Thickness: few Angstroms to 20 um
  • Accuracy: Straight-through Air: Psi = 45 +/- 0.05 degrees, Delta = 0 +/- 0.2 degrees; Thickness: 0.04% (on 1000 Å Oxide)
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UVISEL 2 Spectroscopic Ellipsometer
  • Wavelength Range: 190 to 880 nm (UV-Vis), 880 to 2100 nm (NIR Extension)
  • Optical Resolution: Inquire
  • Film Thickness: Inquire
  • Accuracy: Inquire
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UVISEL Spectroscopic Ellipsometer
  • Wavelength Range: 142 to 2100 nm (depending on model)
  • Optical Resolution: Inquire
  • Film Thickness: 1A to 30 um
  • Accuracy: Psi = 45 +/- 0.02 degrees, Delta = 0 +/- 0.02 degrees
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SpecEl Ellipsometer System
  • Wavelength Range: 380 to 780 nm (optional 450 or 900 nm)
  • Optical Resolution: 4.0 nm (FWHM)
  • Film Thickness: 1 to 5000 nm for Single Transparent Film
  • Accuracy: 0.1 nm Thickness, 0.005% Refractive Index
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  • HORIBA Scientific
  • Ocean Optics

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