Description
An automated, high-throughput S/TEM designed to meet the unique demands of semiconductor device development and manufacturing. The JEM-ACE200F delivers fast, stable, and highly-resolved data acquisition for morphological observation, critical dimension measurements and elemental analysis. The JEM-ACE200F can utilize pre-programmed recipes for wholly unattended operation. Based on the industry-standard ARM200F and F2 JEOL instruments, the ACE provides superb stability and repeatability.
Key Features - CFEG or Schottky source-second-generation Cs Corrector (ASCOR) optional
- HAADF/BF STEM and Secondary Electron detectors standard
- Dual, large-area EDS detectors for high speed chemical analysis
- AutomationCenter for automated recipe data acquisition system