Description
The 2830 ZT Wafer Analyzer is a wavelength dispersive X-ray fluorescence (WDXRF) offering measurement for film thickness and layer composition, dopant levels and surface uniformity of wafers up to 300 mm.
The 4 kW SST-mAX X-ray tube uses game changing ZETA Technology which eliminates the effects of X-ray tube aging, maintaining ‘new tube’ performance throughout the tube’s lifetime.