Description
The witec360 Semiconductor Edition is a high-end confocal Raman and photoluminescence (PL) microscope specifically configured for the chemical imaging of semiconducting materials. It helps researchers accelerate the characterisation of crystallinity, polymorphism, defects, strain and doping in their semiconductor samples and wafers.
The microscope’s extended-range scanning stage enables the inspection of up to 12” (300 mm) wafers and the acquisition of large-area Raman images. It is equipped with vibration damping and active focus stabilization to compensate for topographic variation during measurements over large areas or long acquisition times. All microscope components are fully automated, permitting remote-control and the implementation of standard measurement procedures.
- Analysis of wide-bandgap semiconductors and layered structures.
- Surface analyses, depth scans and 3D imaging.
- Industry-leading confocal Raman and PL microscope for high speed, sensitivity and resolution – simultaneously.
- Scientific-grade, wavelength-optimised Hexalight spectrometer for high signal sensitivity and spectral resolution.
- Large-area scanning (300 x 350 mm) for wafer inspection.
- Active focus stabilization for large-area measurements (TrueSurface).