Cirrus 3 from MKS Instruments

Product Details
ItemCirrus 3
CompanyMKS Instruments
PriceGet Quote
Mass Range1–100 amu standard; 1–200 and 1–300 amu options
Dimensions593 mm L × 291 mm W × 470 mm H (benchtop); 577 mm L × 482 mm W × 266 mm H (rack, 6U)
Bakeout temperature180°C
Operating Temperature5–35°C
Weight35 kg
ApplicationsThermal analysis (TGA, DTA, DSC), atmospheric process monitoring
Minimum Detectable Concentration<100 ppb (typical, non-interfering species)
Inlet2.0 m heated capillary, 150°C, 0.25 in Swagelok
Gas Consumption20 mL/min
Sample Pressure1 bar nominal
Pumping SystemHigh-compression turbo-molecular pump + internal 4-stage diaphragm backing pump
Vacuum Hardware60 L/s turbo molecular pump
Interface / ConnectivityEthernet LAN
Data Acquisition Speed250 data points/sec
Io Capability4 analog inputs (±11 V, 22-bit); 2 analog outputs (0–10 V, 12-bit); 16 TTL digital I/O