| Description | InTouchScope™ SEM Series
The JSM-IT510 InTouchScope™ SEM Series delivers the highest level of intelligent technology with built-in automation for the most versatile analytical SEM available today.
Smart – Flexible – Powerful - Smart – The latest innovations with our InTouchScope™ series SEMs make
InTouchScope™ SEM Series
The JSM-IT510 InTouchScope™ SEM Series delivers the highest level of intelligent technology with built-in automation for the most versatile analytical SEM available today.
Smart – Flexible – Powerful - Smart – The latest innovations with our InTouchScope™ series SEMs make them accessible at every level. JEOL’s Intelligent Technology delivers seamless navigation from optical to SEM imaging, Live EDS both spectrum and X-ray maps and the best auto functions from alignment to focus for fast, clear, and sharp images. We’ve taken it to the next level with Simple SEM, built-in automation for image collection at multiple locations and conditions. Simple SEM simplifies workflow for the most routine tasks. Our embedded Signal Depth display enhances understanding of analytical spatial resolution. All this technology packed into a compact platform for unprecedented ease-of-use.
- Flexible – Choose a platform that is right for you. We offer high vacuum and low vacuum models with or without our Live (embedded) EDS system. [JSM-IT510, JSM-IT510A, JSM-IT510LV, JSM-IT510LA]. This SEM series is equipped with a large specimen chamber that accommodates a wide variety of detectors and accessories such as: EDS, WDS, EBSD, CL, STEM, heating/cooling substages etc.
- Powerful – High resolution W filament source (LaB6 option) with unsurpassed low kV performance. The JSM-IT510 includes a large analytical chamber and stage. The stage is mounted inside the chamber enabling users to secure large, heavy and odd shaped objects on the stage with clear positioning prior to evacuating the chamber.
Zeromag, with our integrated color camera allows for intuitive navigation to the area of interest and seamless transition to SEM imaging and analysis. All data is linked for instant view of analysis locations. Our new high sensitivity quadrant BSE detector can provide a Live 3D surface reconstruction enhancing your view of specimens with complex topography such as a fracture surface, plating defect, etc. Analytical models include JEOL’s fully embedded EDS system for Real-Time, Live EDS spectra and Live X-ray maps.
... Read More | The all-new JIB-PS500i is a multipurpose FIB-SEM that delivers the synergy of fast sample preparation, SEM imaging and EDS analysis in a single instrument. The flexibility of this new FIB-SEM makes it ideal for both industry and academia.
Key Features
- Fast High-Quality TEM Sample Preparation
The
The all-new JIB-PS500i is a multipurpose FIB-SEM that delivers the synergy of fast sample preparation, SEM imaging and EDS analysis in a single instrument. The flexibility of this new FIB-SEM makes it ideal for both industry and academia.
Key Features
- Fast High-Quality TEM Sample Preparation
The new FIB stage offers fast transitioning between processing and imaging, providing real-time feedback of specimen quality. With the ability to prepare samples thinner than 30nm, the FIB-SEM enables superior atomic resolution imaging and analysis with STEM and TEM. A retractable STEM detector enables simultaneous acquisition of bright field and dark field images to precisely evaluate preparation of the TEM sample.
- New Large Chamber/Stage for Ultimate Flexibility
The FIB’s large specimen chamber with easy-access door and easily accessible stage allows an efficient workflow and flexibility for a variety of samples and processes. The 5-axis full-eucentric large motor stage supports large samples and is designed for a wide range of XY travel and stage tilt and rotation.
- New FIB Column with higher current and superior performance at low kV
The high current (up to 100 nA) FIB column is especially effective for large-area milling and analysis, ideal for semiconductor samples. The new FIB has high performance fine milling capabilities essential for quality lamella preparation for imaging, EDS analysis, and 3D microscopy. The new JIB-PS500i is designed for superior performance in the low kV range, as low as 0.5kV, essential for beam sensitive materials.
- Robust Workflow with TEM-Linkage
A new high-throughput, robust workflow from specimen preparation to TEM imaging. TEM-Linkage consists of a double tilt cartridge and TEM holder that facilitates transfer of samples directly from the FIB to the TEM.
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| Detector(s) | Accommodates a wide variety of detectors and accessories such as: EDS, WDS, EBSD, CL, STEM, heating/cooling substages etc. | Secondary electron detector (SED),
Upper electron detector (UED),
In-lens backscattered electron detector (iBED) |