X-ray diffraction (XRD) allows one to ascertain the molecular structure of a crystalline material by diffracting X-rays through the sample. An XRD analyzer obtains interference patterns reflecting lattice structures by varying the angle of incidence of the X-ray beam. Thus, the precision, speed of rotation, and beam size of the X-rays become important parameters by which to judge products. Benchtop XRD can be targeted for single crystal diffraction for imaging lattices; powder diffraction for phase determination; identifying unfamiliar substances for use in inspection, crystallography, and pharmaceutical research correlating crystal structures with drug efficacy. X-ray generators can reach 18 KW in power and detectors typically come as compound silicon arrays, Peltier-Cooled, Silicon Drift, or Scintillation Counter variants. Software targeted for specific XRD applications is available for upgrade in some analyzer models.
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| Company | Malvern Panalytical | Malvern Panalytical |
| Item | Aeris Research Benchtop X-Ray Diffractometer | Crystal Orientation Wafer XRD 300 - Automated Wafer Quality Control |
| Citations | | |
| Catalog Number | Aeris Research | Wafer XRD 300 |
| Price | | |
| X-Ray Tube | Empyrean X-ray tube, Cu | Inquire |
| X-Ray Generator | Wavelengths: Cu or Co, Tube setting: From 300 W to 600 W options in 30 kV or 40 kV setting | Inquire |
| Goniometer Type | DOPS2 goniometer with Heidenhain encoders | Inquire |
| Detector(s) | PIXcel 1D Detector; PIXcel3D Detector | Inquire |
| Description | Prepare to be surprised by our highly accurate, fast XRD system: Aeris. Precise results can be ready in less than five minutes – allowing you to push the scientific frontier. The compact Aeris is small, powerful, and the first of its kind. This compact instrument is smaller and easier to use Prepare to be surprised by our highly accurate, fast XRD system: Aeris. Precise results can be ready in less than five minutes – allowing you to push the scientific frontier. The compact Aeris is small, powerful, and the first of its kind. This compact instrument is smaller and easier to use than floorstanding equipment and bigger and more powerful than benchtop systems. Aeris is just right. It delivers the precision, robustness, and efficiency that our customers know and love – providing outstanding quality with all the convenience of a smaller footprint. Take the one-step sample loading in combination with its controlled user access and the option to design data collection programs offline, the result is a practical and versatile system for all users, from beginners to experts.
Features: - It is intuitive - Place your sample, choose a measurement program, receive your results
- It has best-in-class performance - Superior resolution and linearity for accurate and reliable phase analysis
- It is the ideal teaching tool - With the optional 2D detector you can teach the fundamentals of powder diffraction in a visual manner
- It can measure phase transitions - With the optional non-ambient chamber you can see how the phase composition changes with temperature
Product Detail - Item: Aeris Research Compact X-Ray Diffractometer
... Read More | Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features and Benefits - Ultra-fast precision with our proprietary scan technology
The used method requires only one rotational scan to gather all the necessary data to fully determine the crystal orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
- Fully automated handling and sorting
Wafer XRD 300 is designed to maximize your throughput and productivity. Full integration into your handling and sorting automation makes it a powerful and efficient addition to your process.
- Easy connectivity
Wafer XRD 300’s powerful automation fits easily into your new or existing process, as it is compatible with both MES and SECS/GEM interfaces.
- High precision, deeper insight
Understand your materials like never before with Wafer XRD 300’s key measurements including:
-Crystal orientation
-Notch position, depth, and opening angle
-Diameter
-Flat position and length
-Further sensors available on request
The typical standard deviation tilt (example: Si 100) for the Azimuthal-scan is <0.003o.
- Powerful and versatile
As semiconductor research evolves, it has never been more important to measure a variety of samples. Wafer XRD 300 makes analysis easy and fast for hundreds of materials, including:
-Si
-SiC
-AlN
-Al2O3 (sapphire)
-GaAs
-Quartz
-LiNbO3
-BBO
... Read More |
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