X-ray diffraction (XRD) allows one to ascertain the molecular structure of a crystalline material by diffracting X-rays through the sample. An XRD analyzer obtains interference patterns reflecting lattice structures by varying the angle of incidence of the X-ray beam. Thus, the precision, speed of rotation, and beam size of the X-rays become important parameters by which to judge products. Benchtop XRD can be targeted for single crystal diffraction for imaging lattices; powder diffraction for phase determination; identifying unfamiliar substances for use in inspection, crystallography, and pharmaceutical research correlating crystal structures with drug efficacy. X-ray generators can reach 18 KW in power and detectors typically come as compound silicon arrays, Peltier-Cooled, Silicon Drift, or Scintillation Counter variants. Software targeted for specific XRD applications is available for upgrade in some analyzer models.
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| Company | Malvern Panalytical | Malvern Panalytical |
| Item | Empyrean XAS | Crystal Orientation Wafer XRD 300 - Automated Wafer Quality Control |
| Catalog Number | Empyrean XAS | Wafer XRD 300 |
| Price | | |
| Detector(s) | 1Der Advanced detector | Inquire |
| Description | Empyrean XAS brings laboratory-based XANES and EXAFS measurements to the X-ray diffraction (XRD), X-ray scattering, and imaging techniques of the Empyrean platform.
By enabling multiple structural techniques on a single instrument, Empyrean connects long-range structure, nanoscale organization, Empyrean XAS brings laboratory-based XANES and EXAFS measurements to the X-ray diffraction (XRD), X-ray scattering, and imaging techniques of the Empyrean platform.
By enabling multiple structural techniques on a single instrument, Empyrean connects long-range structure, nanoscale organization, and local chemical environments within one consistent workflow.
Key highlights of the Empyrean XAS:
- Reveal oxidation state, local structure, and chemical state information beyond average crystallographic structure.
- Perform routine XANES and EXAFS measurements without competing for synchrotron beamtime.
- Combine XAS, XRD, scattering, PDF, and imaging on a single Empyrean platform.
- Generate synchrotron-comparable data with excellent agreement to reference synchrotron measurements.
... Read More | Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features and Benefits - Ultra-fast precision with our proprietary scan technology
The used method requires only one rotational scan to gather all the necessary data to fully determine the crystal orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
- Fully automated handling and sorting
Wafer XRD 300 is designed to maximize your throughput and productivity. Full integration into your handling and sorting automation makes it a powerful and efficient addition to your process.
- Easy connectivity
Wafer XRD 300’s powerful automation fits easily into your new or existing process, as it is compatible with both MES and SECS/GEM interfaces.
- High precision, deeper insight
Understand your materials like never before with Wafer XRD 300’s key measurements including:
-Crystal orientation
-Notch position, depth, and opening angle
-Diameter
-Flat position and length
-Further sensors available on request
The typical standard deviation tilt (example: Si 100) for the Azimuthal-scan is <0.003o.
- Powerful and versatile
As semiconductor research evolves, it has never been more important to measure a variety of samples. Wafer XRD 300 makes analysis easy and fast for hundreds of materials, including:
-Si
-SiC
-AlN
-Al2O3 (sapphire)
-GaAs
-Quartz
-LiNbO3
-BBO
... Read More |
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