| Description | Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features and Benefits
- Ultra-fast precision with our proprietary scan technology
The used method requires only one rotational scan to gather all the necessary data to fully determine the crystal orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
- Fully automated handling and sorting
Wafer XRD 300 is designed to maximize your throughput and productivity. Full integration into your handling and sorting automation makes it a powerful and efficient addition to your process.
- Easy connectivity
Wafer XRD 300’s powerful automation fits easily into your new or existing process, as it is compatible with both MES and SECS/GEM interfaces.
- High precision, deeper insight
Understand your materials like never before with Wafer XRD 300’s key measurements including:
-Crystal orientation
-Notch position, depth, and opening angle
-Diameter
-Flat position and length
-Further sensors available on request
The typical standard deviation tilt (example: Si 100) for the Azimuthal-scan is <0.003o.
- Powerful and versatile
As semiconductor research evolves, it has never been more important to measure a variety of samples. Wafer XRD 300 makes analysis easy and fast for hundreds of materials, including:
-Si
-SiC
-AlN
-Al2O3 (sapphire)
-GaAs
-Quartz
-LiNbO3
-BBO
... Read More | The Omega/Theta XRD is your reliable future-proof partner for determining crystal orientation in the changeable semiconductor landscape. Market-leading precision, blazing-fast measurement speed, and high-end build quality are combined with the power of automation – making sure your processes are The Omega/Theta XRD is your reliable future-proof partner for determining crystal orientation in the changeable semiconductor landscape. Market-leading precision, blazing-fast measurement speed, and high-end build quality are combined with the power of automation – making sure your processes are ready for anything. Offering unparalleled efficiency and precision for crystal orientation and alignment, the Omega/Theta XRD is ideally suited to both production and research applications.
Features and Benefits
- Ultra-fast precision with proprietary scan technology
Our method requires only one measuring circle to gather all the necessary data to fully determine the orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
- Easy interfacing for advanced connectivity & automated measurements
All measurements on the Omega/Theta XRD are automated and are managed from within the user-friendly XRD software. The instrument can be easily integrated into existing processes in production environments using its various MES, SECS/GEM, and similar interfaces.
- Characterize a range of materials
Omega/Theta XRD can be used to characterize all single crystalline materials. Commonly used materials are:
-Si
-Ge
-SiC
-AIN
-GaN
-GaAs
-Quartz
-LiNbO3
-CdTe
-BBO
- Convenient, flexible sample handling
Our wide range of accessories enhances the productivity of the Omega/Theta XRD in a wide range of applications from seed boring to grinding, to slicing all the way to wafer geometry end control – keeping you flexible even if those needs change over time. Add-ons include:
-Automatic X-Y mapping stage to map crystal orientation or surface distortions on a user-defined grid
-Stacking stage to align ingots before sawing
-Rocking curve tool for quality measurement
-Additional sample rotation axis
-Photographic camera and image processing
-Laser scanner for sample shape measurement
-Sample adjustment equipment
-There are many more custom engineering solutions!
With customized sample-holders to meet any need from large ingots to tiny cylinders, the Omega/Theta XRD can accommodate a wide range of sample sizes – ensuring that it is equally at home in a production workflow as in research.
... Read More | Quick and precise crystal orientation measurement has never been so accessible – meet the SDCOM, your user-friendly compact XRD. The azimuthal scan method unlocks ultra-fast measurement, with results returned in under five seconds.
SDCOM delivers the highest level of precision of up to 0.01o, Quick and precise crystal orientation measurement has never been so accessible – meet the SDCOM, your user-friendly compact XRD. The azimuthal scan method unlocks ultra-fast measurement, with results returned in under five seconds.
SDCOM delivers the highest level of precision of up to 0.01o, and with a wide variety of sample holders and transfer fixtures including a marking option for lateral crystal direction, this easy-to-use compact is the ideal solution for many applications within wafer processing and research.
Features and Benefits
- Ultra-fast and precise: azimuthal scan method
The azimuthal scan method requires only one measuring circle to gather all the necessary data to fully determine the orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
The sample is rotated 360o, with the X-ray source and detector positioned to achieve a certain number of reflections per turn. These reflections enable the orientation of the crystal lattice to be measured in relation to the rotation axis with high precision in a short period of time.
- Compact and versatile
SDCOM is lightweight and compact, making it easily movable and able to fit easily into your process – whether in research or industry. The XRD Suite software is both powerful and intuitive, making it convenient and easy to operate for a range of users.
Flexibility is key to the SDCOM, which is especially clear in the range of materials it can measure. The SDCOM can measure crystals starting from 1 mm in size, and examples of measurable materials include:
-Cubic, arbitrary unknown orientation: Si, Ge, GaAs, GaP, InP
-Cubic, special orientation: Ag, Au, Ni, Pt, GaSb, InAs, InSb, AlSb, ZnTe, CdTe, SiC3C, PbS, PbTe, SnTe, MgO, LiF, MgAl2O4, SrTiO3, LaTiO3
-Tetragonal: MgF2, TiO2, SrLaAlO4
-Hexagonal and trigonal: SiC 2H, 4H, 6H, 15R, GaN, ZnO, LiNbO3, SiO2 (quartz), Al2O3 (sapphire), GaPO4, La3Ga5SiO14
-Orthorhombic: Mg2SiO4, NdGaO3
There is also a variety of sample holders and transfer fixtures that can further expand the possibilities of your SDCOM’s applications, ensuring compatibility with your workflow. Manual and motorized wafer mapping stages are also available.
- User-friendly precision
SDCOM delivers excellent precision of up to 0.01o depending on the sample, and is able to measure crystals ranging from 1 mm and upwards in size. This precision is maintained at the highest speeds thanks to the azimuthal scan method, which provides full characterization of crystal orientation within a single measuring rotation. There is also an option to include a lateral crystal direction marking function.
Thanks to manual handling and intuitive software design, the SDCOM is easy to use and accessible for a range of user types – practical in both research and industry, where user experience levels may vary.
- Cost-effective
SDCOM’s X-ray tube is air-cooled, eliminating the need for water cooling. Thanks to the SDCOM’s efficiency and small footprint, its energy consumption is kept to a minimum – and so are your running costs.
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