Auger Electron Spectrometer

Auger Electron Spectrometer Used widely in the fields of materials testing and characterization, Auger electron spectrometers are commonly used analytical instruments in the study of surfaces. The spectroscopic technique underlying this technology is the Auger effect which analyses Auger electrons that have been emitted from an atom after a bombardment of X-rays and measures their intensity. Most AES experiments are performed under ultra-high vacuum setups to prevent the scattering of electrons off of residual gas atoms. Some common uses for Auger electron spectroscopy include defect analysis, thin film composition, particle analysis, and small-area depth profiling.

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JAMP-9510F Field Emission Auger Microprobe
JEOL USA, Inc.
  • Type:
    Field Emission Auger Microprobe
  • Signal-to-Noise Ratio:
    Inquire
  • Applications:
    Semiconductor devices, Lithium-ion battery (LIB) materials, REELS analysis, Chemical state analysis, Elemental mapping
PHI 710 Scanning Auger Nanoprobe
Physical Electronics, Inc
  • Type:
    Scanning Auger Nanoprobe
  • Signal-to-Noise Ratio:
    Inquire
  • Applications:
    Surface elemental and chemical state analysis, thin film depth profiling, nano-scale feature characterization, microstructure analysis, semiconductor analysis, insulator analysis, nanovolume characterization, corrosion analysis, metallurgical analysis, additive manufacturing materials analysis
microCMA Compact Auger Analyzer
RBD Instruments
  • Type:
    Single Pass CMA (Cylindrical Mirror Analyzer)
  • Signal-to-Noise Ratio:
    100:1 on clean silver with 300 nA beam current
  • Applications:
    Thin film composition, Passive oxide thicknesses in semiconductors and metals, Metal component thermal oxides, Integrated circuit contamination, Characterization of sputtered layers, Auger depth profiles of deposited layers, Quantization of light element surface films
Citations:
(2)
DESA 150 Double-Pass Auger Electron Spectrometer
STAIB Instruments, Inc.
  • Type:
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  • Signal-to-Noise Ratio:
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  • Applications:
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MICROLAB 350
Thermo Fisher Scientific
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  • Signal-to-Noise Ratio:
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  • Applications:
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RVL2000 Reverse-View LEED/AES System
LK Technologies
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  • Signal-to-Noise Ratio:
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  • Applications:
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Nano-Depth Composition Analyzer NDC600
OCI Vacuum Microengineering
  • Type:
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  • Signal-to-Noise Ratio:
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  • Applications:
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NanoScan Lab
Scienta Omicron
  • Type:
    Scanning Auger Microprobe / Auger Electron Spectrometer
  • Signal-to-Noise Ratio:
    Inquire
  • Applications:
    Surface analysis, elemental mapping, depth profiling, nanoscale characterization, magnetic domain imaging (SEMPA), semiconductor analysis, materials science, thin film analysis
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SEM/SAM+XPS System
SPECS Surface Nano Analysis GmbH
  • Type:
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  • Signal-to-Noise Ratio:
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  • JEOL USA, Inc.
  • LK Technologies
  • OCI Vacuum Microengineering
  • Physical Electronics, Inc
  • RBD Instruments
  • Scienta Omicron
  • SPECS Surface Nano Analysis GmbH
  • STAIB Instruments, Inc.
  • Thermo Fisher Scientific

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