| Description | Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features and Benefits
- Ultra-fast precision with our proprietary scan technology
The used method requires only one rotational scan to gather all the necessary data to fully determine the crystal orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
- Fully automated handling and sorting
Wafer XRD 300 is designed to maximize your throughput and productivity. Full integration into your handling and sorting automation makes it a powerful and efficient addition to your process.
- Easy connectivity
Wafer XRD 300’s powerful automation fits easily into your new or existing process, as it is compatible with both MES and SECS/GEM interfaces.
- High precision, deeper insight
Understand your materials like never before with Wafer XRD 300’s key measurements including:
-Crystal orientation
-Notch position, depth, and opening angle
-Diameter
-Flat position and length
-Further sensors available on request
The typical standard deviation tilt (example: Si 100) for the Azimuthal-scan is <0.003o.
- Powerful and versatile
As semiconductor research evolves, it has never been more important to measure a variety of samples. Wafer XRD 300 makes analysis easy and fast for hundreds of materials, including:
-Si
-SiC
-AlN
-Al2O3 (sapphire)
-GaAs
-Quartz
-LiNbO3
-BBO
... Read More | Produce greener and more efficient. The Cement edition of Aeris is an easy-to-use and automatable compact instrument for every stage of the cement production process, from raw
meal, clinker and (blended) cement to the final product.
Aeris is ideal for process control in cement plants and Produce greener and more efficient. The Cement edition of Aeris is an easy-to-use and automatable compact instrument for every stage of the cement production process, from raw
meal, clinker and (blended) cement to the final product.
Aeris is ideal for process control in cement plants and automated Rietveld quantitative analysis
of cement products for related industries such as Departments of Transportation. This compact
instrument is smaller and easier to use than floorstanding equipment and more powerful than
benchtop systems. Aeris delivers the precision, robustness, and efficiency that our customers
know and love – providing outstanding quality with all the convenience of a smaller footprint (no
external cooler required).
Aeris has an optional six position changer, and is automatable – external sample loading from
belt or robot are possible. Aeris has best in class dust protection, with a rating of IP40.
Features:
- Seamless integration in automation - for high sample throughput Aeris can be
connected with a belt or a robot for fast and automated sample processing.
- Fast analysis, maximum uptime - analysis time for clinker or cement is just 5 minutes.
- Industry ready - Compatible with all common industry standards.
... Read More | Prepare to be surprised by our highly accurate, fast XRD system: Aeris.
Precise results can be ready in less than five minutes – allowing you to push
the scientific frontier. The compact Aeris is small, powerful, and the first of its
kind.
This compact instrument is smaller and easier to use Prepare to be surprised by our highly accurate, fast XRD system: Aeris.
Precise results can be ready in less than five minutes – allowing you to push
the scientific frontier. The compact Aeris is small, powerful, and the first of its
kind.
This compact instrument is smaller and easier to use than floorstanding equipment and bigger and
more powerful than benchtop systems. Aeris is just right. It delivers the precision, robustness, and
efficiency that our customers know and love – providing outstanding quality with all the convenience
of a smaller footprint.
Take the one-step sample loading in combination with its controlled user
access and the option to design data collection programs offline, the result is
a practical and versatile system for all users, from beginners to experts.
Features:
- It is intuitive - Place your sample, choose a measurement program, receive your results
- It has best-in-class performance - Superior resolution and linearity for accurate and reliable
phase analysis
- It is the ideal teaching tool - With the optional 2D detector you can teach the fundamentals
of powder diffraction in a visual manner
- It can measure phase transitions - With the optional non-ambient chamber you can see
how the phase composition changes with temperature
Product Detail
- Item: Aeris Research Compact X-Ray Diffractometer
... Read More | The Omega/Theta XRD is your reliable future-proof partner for determining crystal orientation in the changeable semiconductor landscape. Market-leading precision, blazing-fast measurement speed, and high-end build quality are combined with the power of automation – making sure your processes are The Omega/Theta XRD is your reliable future-proof partner for determining crystal orientation in the changeable semiconductor landscape. Market-leading precision, blazing-fast measurement speed, and high-end build quality are combined with the power of automation – making sure your processes are ready for anything. Offering unparalleled efficiency and precision for crystal orientation and alignment, the Omega/Theta XRD is ideally suited to both production and research applications.
Features and Benefits
- Ultra-fast precision with proprietary scan technology
Our method requires only one measuring circle to gather all the necessary data to fully determine the orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
- Easy interfacing for advanced connectivity & automated measurements
All measurements on the Omega/Theta XRD are automated and are managed from within the user-friendly XRD software. The instrument can be easily integrated into existing processes in production environments using its various MES, SECS/GEM, and similar interfaces.
- Characterize a range of materials
Omega/Theta XRD can be used to characterize all single crystalline materials. Commonly used materials are:
-Si
-Ge
-SiC
-AIN
-GaN
-GaAs
-Quartz
-LiNbO3
-CdTe
-BBO
- Convenient, flexible sample handling
Our wide range of accessories enhances the productivity of the Omega/Theta XRD in a wide range of applications from seed boring to grinding, to slicing all the way to wafer geometry end control – keeping you flexible even if those needs change over time. Add-ons include:
-Automatic X-Y mapping stage to map crystal orientation or surface distortions on a user-defined grid
-Stacking stage to align ingots before sawing
-Rocking curve tool for quality measurement
-Additional sample rotation axis
-Photographic camera and image processing
-Laser scanner for sample shape measurement
-Sample adjustment equipment
-There are many more custom engineering solutions!
With customized sample-holders to meet any need from large ingots to tiny cylinders, the Omega/Theta XRD can accommodate a wide range of sample sizes – ensuring that it is equally at home in a production workflow as in research.
... Read More | Wafer XRD 200 is your fully automated high-speed X-ray diffraction platform for wafer production and research as you have never seen it before.
Wafer XRD 200 provides key data on a variety of essential parameters such as crystal orientation and resistivity, geometric features like notches and Wafer XRD 200 is your fully automated high-speed X-ray diffraction platform for wafer production and research as you have never seen it before.
Wafer XRD 200 provides key data on a variety of essential parameters such as crystal orientation and resistivity, geometric features like notches and flats, distance measurements, and much more – within just a few seconds. Designed to fit seamlessly into your process line.
Features and Benefits
- Ultra-fast precision with proprietary scan technology
The method requires only one wafer rotation to gather all the necessary data to fully determine the orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
- Fully automated handling and sorting
Wafer XRD 200 is designed to optimize your throughput and productivity. Full automation of handling and sorting and detailed data transmission tools, make it a powerful and efficient element in your QC process.
- Easy connectivity
Wafer XRD 200’s powerful automation is compatible with both MES and SECS/GEM interfaces. It fits easily into your new or existing process.
- High precision, deeper insight
Understand your materials like never before with Wafer XRD 200’s key measurements. Wafer XRD 200 measures:
-Crystal orientation
-Notch position, depth, and opening angle
-Diameter
-Flat position and length
-Resistivity
The typical standard deviation tilt (example: Si 100) for the Azimuthal-scan is <0.003o, minimum <0.001o.
- Powerful and versatile
The Wafer XRD 200 makes a wide range of measurements possible at speed – which will add real value to your processes, whether in research or production. But that is not the only way in which the Wafer XRD 200 is versatile and flexible.
Wafer XRD 200 makes analysis easy and fast for hundreds of potential samples, including:
-Si
-SiC
-AlN
-Al2O3 (sapphire)
-GaAs
-Quartz
-LiNbO3
-BBO
... Read More |