| Description | The X’Pert3 Materials Research Diffractometer (MRD) is the system of choice for detailed structural analysis of advanced semiconductors, thin film, and nanomaterials. It handles a wide variety of X-ray scattering methods, including high resolution diffraction, in-plane diffraction, reflectivity, The X’Pert3 Materials Research Diffractometer (MRD) is the system of choice for detailed structural analysis of advanced semiconductors, thin film, and nanomaterials. It handles a wide variety of X-ray scattering methods, including high resolution diffraction, in-plane diffraction, reflectivity, thin film phase analysis, wafer mapping, GISAXS, stress, texture and nonambient analysis. The X’Pert3 MRD features the highest resolution goniometer with Heidenhain encoders for lightening fast positioning, a 5 axis cradle allowing for support and mapping of wafers up to 6 inches in diameter, and a wide variety of advanced optics and detectors, including the PIXcel3D for fast reciprocal space mapping.... Read More | Aeris Minerals Edition from Malvern
Panalytical
Minerals edition of Aeris is ideal for monitoring mineral phases and tracking process parameters
during ore beneficiation. Aeris delivers best in class data quality and speed, and never requires
an external cooler. The touchscreen interface is easyAeris Minerals Edition from Malvern
Panalytical
Minerals edition of Aeris is ideal for monitoring mineral phases and tracking process parameters
during ore beneficiation. Aeris delivers best in class data quality and speed, and never requires
an external cooler. The touchscreen interface is easy for all to use. Aeris has an optional six
position changer and is automatable – external sample loading from belt or robot are possible.
Aeris has best in class dust protection, with a rating of IP40.
The Aeris Minerals edition is your partner at every stage of the production process, from raw
material to the final product. The Aeris Compact is just right. It delivers the precision, robustness,
and efficiency that our customers know and love – providing outstanding quality with all the
convenience of a smaller footprint.
Features:
- Seamless integration in automation - for high sample throughput Aeris can be
connected with a belt or a robot for fast and automated sample processing.
- Fast analysis, maximum uptime - Typical measurement times of Aeris are less than 10
minutes per sample.
- Strong and robust - Compatible with all common industry standards
... Read More | Ultra-fast, precise (up to (1/100)o crystal orientation at your fingertips. DDCOM acquires reliable results more than 100 times faster than the traditional methods with additional time savings due to the top down-measurement geometry. This highly versatility instrument utilizes an air-cooled X-ray Ultra-fast, precise (up to (1/100)o crystal orientation at your fingertips. DDCOM acquires reliable results more than 100 times faster than the traditional methods with additional time savings due to the top down-measurement geometry. This highly versatility instrument utilizes an air-cooled X-ray tube and portable design to ensure lower running costs and maximum convenience, ideal for quality control, marking, and research applications.
Features and Benefits
- Ultra fast accuracy
Our proprietary scan method requires only one scan rotation to gather all the necessary data for crystal orientation determination, delivering precise results in 10 seconds (single rotation).
The material-specific instrument geometry enables the orientation of the crystal lattice to be measured in relation to the rotation axis ultra-fast with precision increasing with a number of scan rotations.
- Compact, user-friendly format
The compact design of DDCOM allows the system to fit into any setting. The software is both powerful and intuitive, making it convenient and easy to operate for a range of users.
- Precise, efficient control
Maintain control of cutting, grinding, and lapping processes with high precision up to 1/100o. DDCOM delivers complete lattice orientation of single crystals and is designed for the azimuthal setting and marking of crystal orientation.
Pre-programmed crystal parameters enable the determination of arbitrary unknown orientation of various structures and aid in refining the workflow for greater efficiency. Various stage accessories enable metrology in different process steps.
- Versatile and cost-effective
DDCOM is well-equipped for both research and production environments in which a range of sample types need to be analyzed. Operating costs are low for the DDCOM, thanks to its low energy consumption and air-cooled X-ray tube – no water cooling is required.
The instrument can measure a range of different materials with varying structures making it a versatile addition to any laboratory. Some examples of measurable materials include:
-Cubic, arbitrary unknown orientation: Si, Ge, GaAs, GaP, InP
-Cubic, special orientation: Ag, Au, Ni, Pt, GaSb, InAs, InSb, AlSb, ZnTe, CdTe, SiC3C, PbS, PbTe, SnTe, MgO, LiF, MgAl2O4, SrTiO3, LaTiO3
-Tetragonal: MgF2, TiO2, SrLaAlO4
-Hexagonal and trigonal: SiC 2H, 4H, 6H, 15R, GaN, ZnO, LiNbO3, SiO2 (quartz), Al2O3 (sapphire), GaPO4, La3Ga5SiO14
-Orthorhombic: Mg2SiO4, NdGaO3
... Read More | Quick and precise crystal orientation measurement has never been so accessible – meet the SDCOM, your user-friendly compact XRD. The azimuthal scan method unlocks ultra-fast measurement, with results returned in under five seconds.
SDCOM delivers the highest level of precision of up to 0.01o, Quick and precise crystal orientation measurement has never been so accessible – meet the SDCOM, your user-friendly compact XRD. The azimuthal scan method unlocks ultra-fast measurement, with results returned in under five seconds.
SDCOM delivers the highest level of precision of up to 0.01o, and with a wide variety of sample holders and transfer fixtures including a marking option for lateral crystal direction, this easy-to-use compact is the ideal solution for many applications within wafer processing and research.
Features and Benefits
- Ultra-fast and precise: azimuthal scan method
The azimuthal scan method requires only one measuring circle to gather all the necessary data to fully determine the orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
The sample is rotated 360o, with the X-ray source and detector positioned to achieve a certain number of reflections per turn. These reflections enable the orientation of the crystal lattice to be measured in relation to the rotation axis with high precision in a short period of time.
- Compact and versatile
SDCOM is lightweight and compact, making it easily movable and able to fit easily into your process – whether in research or industry. The XRD Suite software is both powerful and intuitive, making it convenient and easy to operate for a range of users.
Flexibility is key to the SDCOM, which is especially clear in the range of materials it can measure. The SDCOM can measure crystals starting from 1 mm in size, and examples of measurable materials include:
-Cubic, arbitrary unknown orientation: Si, Ge, GaAs, GaP, InP
-Cubic, special orientation: Ag, Au, Ni, Pt, GaSb, InAs, InSb, AlSb, ZnTe, CdTe, SiC3C, PbS, PbTe, SnTe, MgO, LiF, MgAl2O4, SrTiO3, LaTiO3
-Tetragonal: MgF2, TiO2, SrLaAlO4
-Hexagonal and trigonal: SiC 2H, 4H, 6H, 15R, GaN, ZnO, LiNbO3, SiO2 (quartz), Al2O3 (sapphire), GaPO4, La3Ga5SiO14
-Orthorhombic: Mg2SiO4, NdGaO3
There is also a variety of sample holders and transfer fixtures that can further expand the possibilities of your SDCOM’s applications, ensuring compatibility with your workflow. Manual and motorized wafer mapping stages are also available.
- User-friendly precision
SDCOM delivers excellent precision of up to 0.01o depending on the sample, and is able to measure crystals ranging from 1 mm and upwards in size. This precision is maintained at the highest speeds thanks to the azimuthal scan method, which provides full characterization of crystal orientation within a single measuring rotation. There is also an option to include a lateral crystal direction marking function.
Thanks to manual handling and intuitive software design, the SDCOM is easy to use and accessible for a range of user types – practical in both research and industry, where user experience levels may vary.
- Cost-effective
SDCOM’s X-ray tube is air-cooled, eliminating the need for water cooling. Thanks to the SDCOM’s efficiency and small footprint, its energy consumption is kept to a minimum – and so are your running costs.
... Read More | Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features and Benefits
- Ultra-fast precision with our proprietary scan technology
The used method requires only one rotational scan to gather all the necessary data to fully determine the crystal orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
- Fully automated handling and sorting
Wafer XRD 300 is designed to maximize your throughput and productivity. Full integration into your handling and sorting automation makes it a powerful and efficient addition to your process.
- Easy connectivity
Wafer XRD 300’s powerful automation fits easily into your new or existing process, as it is compatible with both MES and SECS/GEM interfaces.
- High precision, deeper insight
Understand your materials like never before with Wafer XRD 300’s key measurements including:
-Crystal orientation
-Notch position, depth, and opening angle
-Diameter
-Flat position and length
-Further sensors available on request
The typical standard deviation tilt (example: Si 100) for the Azimuthal-scan is <0.003o.
- Powerful and versatile
As semiconductor research evolves, it has never been more important to measure a variety of samples. Wafer XRD 300 makes analysis easy and fast for hundreds of materials, including:
-Si
-SiC
-AlN
-Al2O3 (sapphire)
-GaAs
-Quartz
-LiNbO3
-BBO
... Read More |