| Description | The X’Pert3 Materials Research Diffractometer (MRD) is the system of choice for detailed structural analysis of advanced semiconductors, thin film, and nanomaterials. It handles a wide variety of X-ray scattering methods, including high resolution diffraction, in-plane diffraction, reflectivity, The X’Pert3 Materials Research Diffractometer (MRD) is the system of choice for detailed structural analysis of advanced semiconductors, thin film, and nanomaterials. It handles a wide variety of X-ray scattering methods, including high resolution diffraction, in-plane diffraction, reflectivity, thin film phase analysis, wafer mapping, GISAXS, stress, texture and nonambient analysis. The X’Pert3 MRD features the highest resolution goniometer with Heidenhain encoders for lightening fast positioning, a 5 axis cradle allowing for support and mapping of wafers up to 6 inches in diameter, and a wide variety of advanced optics and detectors, including the PIXcel3D for fast reciprocal space mapping.... Read More | Ultra-fast, precise (up to (1/100)o crystal orientation at your fingertips. DDCOM acquires reliable results more than 100 times faster than the traditional methods with additional time savings due to the top down-measurement geometry. This highly versatility instrument utilizes an air-cooled X-ray Ultra-fast, precise (up to (1/100)o crystal orientation at your fingertips. DDCOM acquires reliable results more than 100 times faster than the traditional methods with additional time savings due to the top down-measurement geometry. This highly versatility instrument utilizes an air-cooled X-ray tube and portable design to ensure lower running costs and maximum convenience, ideal for quality control, marking, and research applications.
Features and Benefits
- Ultra fast accuracy
Our proprietary scan method requires only one scan rotation to gather all the necessary data for crystal orientation determination, delivering precise results in 10 seconds (single rotation).
The material-specific instrument geometry enables the orientation of the crystal lattice to be measured in relation to the rotation axis ultra-fast with precision increasing with a number of scan rotations.
- Compact, user-friendly format
The compact design of DDCOM allows the system to fit into any setting. The software is both powerful and intuitive, making it convenient and easy to operate for a range of users.
- Precise, efficient control
Maintain control of cutting, grinding, and lapping processes with high precision up to 1/100o. DDCOM delivers complete lattice orientation of single crystals and is designed for the azimuthal setting and marking of crystal orientation.
Pre-programmed crystal parameters enable the determination of arbitrary unknown orientation of various structures and aid in refining the workflow for greater efficiency. Various stage accessories enable metrology in different process steps.
- Versatile and cost-effective
DDCOM is well-equipped for both research and production environments in which a range of sample types need to be analyzed. Operating costs are low for the DDCOM, thanks to its low energy consumption and air-cooled X-ray tube – no water cooling is required.
The instrument can measure a range of different materials with varying structures making it a versatile addition to any laboratory. Some examples of measurable materials include:
-Cubic, arbitrary unknown orientation: Si, Ge, GaAs, GaP, InP
-Cubic, special orientation: Ag, Au, Ni, Pt, GaSb, InAs, InSb, AlSb, ZnTe, CdTe, SiC3C, PbS, PbTe, SnTe, MgO, LiF, MgAl2O4, SrTiO3, LaTiO3
-Tetragonal: MgF2, TiO2, SrLaAlO4
-Hexagonal and trigonal: SiC 2H, 4H, 6H, 15R, GaN, ZnO, LiNbO3, SiO2 (quartz), Al2O3 (sapphire), GaPO4, La3Ga5SiO14
-Orthorhombic: Mg2SiO4, NdGaO3
... Read More | Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features and Benefits
- Ultra-fast precision with our proprietary scan technology
The used method requires only one rotational scan to gather all the necessary data to fully determine the crystal orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
- Fully automated handling and sorting
Wafer XRD 300 is designed to maximize your throughput and productivity. Full integration into your handling and sorting automation makes it a powerful and efficient addition to your process.
- Easy connectivity
Wafer XRD 300’s powerful automation fits easily into your new or existing process, as it is compatible with both MES and SECS/GEM interfaces.
- High precision, deeper insight
Understand your materials like never before with Wafer XRD 300’s key measurements including:
-Crystal orientation
-Notch position, depth, and opening angle
-Diameter
-Flat position and length
-Further sensors available on request
The typical standard deviation tilt (example: Si 100) for the Azimuthal-scan is <0.003o.
- Powerful and versatile
As semiconductor research evolves, it has never been more important to measure a variety of samples. Wafer XRD 300 makes analysis easy and fast for hundreds of materials, including:
-Si
-SiC
-AlN
-Al2O3 (sapphire)
-GaAs
-Quartz
-LiNbO3
-BBO
... Read More | The X’Pert3 MRD-XL Materials Research Diffractometer is the system of choice for high resolution diffraction and scattering analysis of wafers up to 300mm in diameter. It handles a wide variety of X-ray scattering methods, including high resolution diffraction, in-plane diffraction, reflectivity, The X’Pert3 MRD-XL Materials Research Diffractometer is the system of choice for high resolution diffraction and scattering analysis of wafers up to 300mm in diameter. It handles a wide variety of X-ray scattering methods, including high resolution diffraction, in-plane diffraction, reflectivity, thin film phase analysis, wafer mapping, GISAXS, stress, texture and nonambient analysis. The X’Pert3 MRD features the highest resolution goniometer with Heidenhain encoders for lightening fast positioning, a 5 axis cradle allowing for support and mapping of wafers up to 6 inches in diameter, and a wide variety of advanced optics and detectors, including the PIXcel3D for fast reciprocal space mapping. The X’Pert3 MRD-XL also offers a sophisticated, automatic wafer loader option that enables the X'Pert3 MRD XL to function as an 'in-wall' system, with the wafer being loaded from a clean room environment and placed on to a self-centered wafer holder.... Read More | XRD-OEM is a game-changer for your production processes. Built to withstand the challenging conditions of grinding and sawing, this X-ray diffraction instrument offers seamless integration with any processing system thanks to its industry-standard interfacing. XRD-OEM provides independent XRD-OEM is a game-changer for your production processes. Built to withstand the challenging conditions of grinding and sawing, this X-ray diffraction instrument offers seamless integration with any processing system thanks to its industry-standard interfacing. XRD-OEM provides independent orientation measurement of ingots, boules, or panels, enabling measurements on both flat surfaces and circumferences – while optical notch detection ensures precise pre-alignment before sawing or grinding processes.
Features and Benefits
- Compact and connected
Designed to integrate effortlessly with any automation or processing system, XRD-OEM enables a streamlined, efficient, and continuous operation. Its compact form and standard industrial interfaces ensure that it fits easily into any manufacturing setup and works well with your existing instruments and systems.
- Tough enough for your process
Built for resilience, XRD-OEM can be deployed in whichever environment you need it, including in grinding and sawing processes. It stays reliable and precise, even under demanding production conditions.
- Fast and precise
XRD-OEM offers automated precision where it matters the most. Precise determination of crystal orientation supports your high standards of quality control while optimizing your processes for greater efficiency and overall quality.
XRD-OEM can determine crystal orientation on both flat surfaces and circumferences for extra versatility.
- Optical notch detection
Optical notch detection precisely identifies and characterizes flat and notch features on your samples – essential during the pre-alignment of large ingots before the sawing or grinding processes.
- Wide range of sample sizes
XRD-OEM can determine crystal orientation on both flat surfaces and circumferences for extra versatility.
... Read More |