Description
The JAMP-9510F offers the highest spatial resolution available in an Auger microprobe: (min. probe diameter of 3nm SEI; 8nm for Auger analysis). Employing a low-aberration condenser lens (in which an electrostatic field and a magnetic field are superposed), combined with a patented "in-lens' Schottky field emission gun, the JAMP-9510F obtains very small spot sizes with beam currents up to 200nA.
Key Features
- 3nm SEI resolution
- 8nm probe diameter for Auger analysis
- Variable energy resolution from 0.05% to 0.6%
- Chemical state analysis in several 10nm areas
- Neutralizing gun allows Auger analysis of insulating materials
- Large specimen stage - samples up to 95mm in diameter