Description
The PHI 710 Scanning Auger Nanoprobe is a unique, high performance Auger Electron Spectroscopy (AES) instrument that provides elemental and chemical state information from sample surfaces and nano-scale features, thin films, and interfaces. Features coaxial CMA geometry for superior imaging of real-world rough surfaces, 500,000x working magnification, high energy resolution to 0.1%, and floating column ion gun for depth profiling from 100 eV to 5 keV.