Used widely in the fields of materials testing and characterization, Auger electron spectrometers are commonly used analytical instruments in the study of surfaces. The spectroscopic technique underlying this technology is the Auger effect which analyses Auger electrons that have been emitted from an atom after a bombardment of X-rays and measures their intensity. Most AES experiments are performed under ultra-high vacuum setups to prevent the scattering of electrons off of residual gas atoms. Some common uses for Auger electron spectroscopy include defect analysis, thin film composition, particle analysis, and small-area depth profiling.
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RBD Instruments
- Single Pass CMA (Cylindrical Mirror Analyzer)
- 100:1 on clean silver with 300 nA beam current
- Thin film composition, Passive oxide thicknesses in semiconductors and metals, Metal component thermal oxides, Integrated circuit contamination, Characterization of sputtered layers, Auger depth profiles of deposited layers, Quantization of light element surface films
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