RAMANdrive Wafer Analysis System from Bruker Optics

Product Details
ItemRAMANdrive Wafer Analysis System
CompanyBruker Optics
PriceGet Info
Spatial Resolution350 nm (X), 500 nm (Y), 1 µm (Z)
Imaging Speed400 spectra in a single laser shot
Spectral Resolution<1.2 cm?¹ (depends on grating)
Scanning Range300 × 300 × 35 mm XYZ-motorized stage
ApplicationsSemiconductor wafer inspection and characterization; Particle detection (smaller than 100 nm)
Laser SafetyLaser safety class I door with interlock