FEI¹s New Helios NanoLab 660 DualBeam Sets New Standard for Imaging and Milling Performance

Latest generation of FEI¹s industry-leading DualBeam for materials science research to be showcased at the 7th International Conference on Materials for Advanced Technologies, 30 June to 5 July, 2013, Suntec, Singapore.

FEI will showcase its new Helios NanoLab 660 DualBeam , at the upcoming Materials Research Society conference in Singapore. The Helios NanoLab 660 DualBeam system provides one of the highest imaging resolution and contrast SEMs, combined with one of the fastest and most precise FIB milling performances of any commercially-available focused ion beam/scanning electron microscope (FIB/SEM) system.

DualBeam (FIB/SEM) systems are used to investigate the structure and function of materials at the nanometer scale, create prototypes of micro and nano electro-mechanical systems (MEMS and NEMS), and prepare ultrathin samples for atomic scale imaging and analysis in a transmission electron microscope (TEM).

³The Helios NanoLab 660 DualBeam adds our second-generation extreme high-resolution (XHR) SEM capability to the proven Helios DualBeam platform to provide sub-nanometer imaging resolution over a wide range of accelerating voltages. Its precise selective contrast enhancement can be tailored to reveal the finest details of the sample¹s topography, structure, composition and more,² said Trisha Rice, vice president and general manager, Materials Science Business Unit, FEI. ³The combination of high-resolution, high-contrast imaging and high-performance milling allows researchers to access more accurate information from their sample in less time. A new high-current mode enables faster analysis.²

³The Helios NanoLab DualBeam is indispensable for high-resolution imaging of surfaces, sections or volumes of a wide variety of materials, especially soft or delicate samples, such as carbon nanotubes, polymers, ceramics, catalysts, etc.,² added Rice. ³The SEM¹s exceptional performance at low accelerating voltages, reduces beam damage, and dramatically improves sensitivity to surface detail.²

NanoBuilder 2.0, a second-generation nanoprototyping toolset now introduced on the Helios NanoLab 660, automatically fabricates 3D prototypes of nano- and microscale devices, such as nanosensors from computer-generated models, and thereby simplifies and accelerates the prototyping workflow. Starting with a CAD design, the NanoBuilder software directs FIB milling and deposition to build intricate 3D structures with features ranging in size from nanometers to millimeters.

FEI¹s second-generation XHR SEM uses proprietary electron optical and detector technologies to deliver sub-nanometer imaging resolution, with high signal collection efficiency and high contrast, over the widest range of accelerating voltages (0.5-30 kV). Fast time to data is enabled both by the new in-column detection, which allows simultaneous topographic and materials contrast imaging and precise materials information from triple backscattered electron filtering, and by the new high-current SEM mode, which delivers up to 100 nA in a micrometric spot. The Tomahawk FIB column guarantees the tightest beam at high and low currents, for fast, precise large-volume removal and polishing, respectively; and exceptional low-energy performance, to remove surface damage in the final polishing steps of thin sample preparation.

To optimally serve nanoprototyping and sample preparation applications, the Helios NanoLab 660 DualBeam continues to support FEI¹s latest technology advancements, such as the EasyLift nanomanipulator, for the fastest, most reliable thin sample preparation using the in situ lift out (INLO) method, and the MultiChem gas injector system, for gas-assisted etching and beam-induced deposition of materials with higher speed and quality, added flexibility and optimal process control.

For more information, please visit FEI at the 7th International Conference on Materials for Advanced Technologies, 30 June to 5 July, 2013, Suntec, Singapore.

About FEI

FEI (Nasdaq: FEIC) is a leading supplier of scientific instruments for nano-scale applications and solutions for industry and science. With more than 60 years of technological innovation and leadership, FEI has set the performance standard in transmission electron microscopes (TEM), scanning electron microscopes (SEM) and DualBeams , which combine a SEM with a focused ion beam (FIB). FEI has over 2,500 employees and sales and service operations in more than 50 countries around the world. More information can be found at: www.fei.com.

FEI Safe Harbor Statement

This news release contains forward-looking statements that include statements regarding the performance capabilities and benefits of the Helios NanoLab 660 DualBeam system. Factors that could affect these forward-looking statements include but are not limited to failure of the product or technology to perform as expected and achieve anticipated results, unexpected technology problems and challenges, changes to the technology, the inability of FEI, its suppliers or project partners to make the technological advances required for the technology to achieve anticipated results, the inability of customers to develop and deploy the expected new applications and our ability to manufacture, ship and deliver the tools or software as expected. Please also refer to our Form 10-K, Forms 10-Q, Forms 8-K and other filings with the U.S. Securities and Exchange Commission for additional information on these factors and other factors that could cause actual results to differ materially from the forward-looking statements. FEI assumes no duty to update forward-looking statements.