Cirrus 3-XD from MKS Instruments

Product Details
ItemCirrus 3-XD
CompanyMKS Instruments
PriceGet Quote
Mass Range1–100 amu standard; 1–200 and 1–300 amu options
ApplicationsThermal analysis (TGA, DTA), atmospheric process monitoring
Bakeout temperature180°C
Operating Temperature5–35°C
Interface / ConnectivityEthernet LAN
Minimum Detectable Concentration<15 ppb (3-sigma, Ar or N2)
Ion OpticsPatented V-lens™ double-focusing and deflection
Inlet2.0 m heated capillary, 150°C, 0.25 in Swagelok
Gas Consumption20 mL/min
Sample Pressure1 bar nominal
Pumping SystemHigh-compression turbo-molecular pump + internal 4-stage diaphragm backing pump; corrosive gas option available
Io Capability4 analog inputs (±11 V, 22-bit); 2 analog outputs (0–10 V, 12-bit); 16 TTL digital I/O