X-ray diffraction (XRD) allows one to ascertain the molecular structure of a crystalline material by diffracting X-rays through the sample. An XRD analyzer obtains interference patterns reflecting lattice structures by varying the angle of incidence of the X-ray beam. Thus, the precision, speed of rotation, and beam size of the X-rays become important parameters by which to judge products. Benchtop XRD can be targeted for single crystal diffraction for imaging lattices; powder diffraction for phase determination; identifying unfamiliar substances for use in inspection, crystallography, and pharmaceutical research correlating crystal structures with drug efficacy. X-ray generators can reach 18 KW in power and detectors typically come as compound silicon arrays, Peltier-Cooled, Silicon Drift, or Scintillation Counter variants. Software targeted for specific XRD applications is available for upgrade in some analyzer models.
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| Company | Malvern Panalytical | Malvern Panalytical |
| Item | Crystal Orientation Wafer XRD 200 - Automated Wafer Quality Control | Crystal Orientation Omega/Theta - X-Ray Diffractometer |
| Catalog Number | Wafer XRD 200 | Omega/Theta XRD |
| Price | | |
| X-Ray Tube | Inquire | Standard X-ray tube, Cu anode |
| X-Ray Generator | Inquire | Standard X-ray tube, Cu anode |
| Detector(s) | Inquire | Scintillation counter (single or double) |
| Description | Wafer XRD 200 is your fully automated high-speed X-ray diffraction platform for wafer production and research as you have never seen it before.
Wafer XRD 200 provides key data on a variety of essential parameters such as crystal orientation and resistivity, geometric features like notches and Wafer XRD 200 is your fully automated high-speed X-ray diffraction platform for wafer production and research as you have never seen it before.
Wafer XRD 200 provides key data on a variety of essential parameters such as crystal orientation and resistivity, geometric features like notches and flats, distance measurements, and much more – within just a few seconds. Designed to fit seamlessly into your process line.
Features and Benefits - Ultra-fast precision with proprietary scan technology
The method requires only one wafer rotation to gather all the necessary data to fully determine the orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
- Fully automated handling and sorting
Wafer XRD 200 is designed to optimize your throughput and productivity. Full automation of handling and sorting and detailed data transmission tools, make it a powerful and efficient element in your QC process.
- Easy connectivity
Wafer XRD 200’s powerful automation is compatible with both MES and SECS/GEM interfaces. It fits easily into your new or existing process.
- High precision, deeper insight
Understand your materials like never before with Wafer XRD 200’s key measurements. Wafer XRD 200 measures:
-Crystal orientation
-Notch position, depth, and opening angle
-Diameter
-Flat position and length
-Resistivity
The typical standard deviation tilt (example: Si 100) for the Azimuthal-scan is <0.003o, minimum <0.001o.
- Powerful and versatile
The Wafer XRD 200 makes a wide range of measurements possible at speed – which will add real value to your processes, whether in research or production. But that is not the only way in which the Wafer XRD 200 is versatile and flexible.
Wafer XRD 200 makes analysis easy and fast for hundreds of potential samples, including:
-Si
-SiC
-AlN
-Al2O3 (sapphire)
-GaAs
-Quartz
-LiNbO3
-BBO
... Read More | The Omega/Theta XRD is your reliable future-proof partner for determining crystal orientation in the changeable semiconductor landscape. Market-leading precision, blazing-fast measurement speed, and high-end build quality are combined with the power of automation – making sure your processes are The Omega/Theta XRD is your reliable future-proof partner for determining crystal orientation in the changeable semiconductor landscape. Market-leading precision, blazing-fast measurement speed, and high-end build quality are combined with the power of automation – making sure your processes are ready for anything. Offering unparalleled efficiency and precision for crystal orientation and alignment, the Omega/Theta XRD is ideally suited to both production and research applications.
Features and Benefits - Ultra-fast precision with proprietary scan technology
Our method requires only one measuring circle to gather all the necessary data to fully determine the orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
- Easy interfacing for advanced connectivity & automated measurements
All measurements on the Omega/Theta XRD are automated and are managed from within the user-friendly XRD software. The instrument can be easily integrated into existing processes in production environments using its various MES, SECS/GEM, and similar interfaces.
- Characterize a range of materials
Omega/Theta XRD can be used to characterize all single crystalline materials. Commonly used materials are:
-Si
-Ge
-SiC
-AIN
-GaN
-GaAs
-Quartz
-LiNbO3
-CdTe
-BBO
- Convenient, flexible sample handling
Our wide range of accessories enhances the productivity of the Omega/Theta XRD in a wide range of applications from seed boring to grinding, to slicing all the way to wafer geometry end control – keeping you flexible even if those needs change over time. Add-ons include:
-Automatic X-Y mapping stage to map crystal orientation or surface distortions on a user-defined grid
-Stacking stage to align ingots before sawing
-Rocking curve tool for quality measurement
-Additional sample rotation axis
-Photographic camera and image processing
-Laser scanner for sample shape measurement
-Sample adjustment equipment
-There are many more custom engineering solutions!
With customized sample-holders to meet any need from large ingots to tiny cylinders, the Omega/Theta XRD can accommodate a wide range of sample sizes – ensuring that it is equally at home in a production workflow as in research.
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