X-ray diffraction (XRD) allows one to ascertain the molecular structure of a crystalline material by diffracting X-rays through the sample. An XRD analyzer obtains interference patterns reflecting lattice structures by varying the angle of incidence of the X-ray beam. Thus, the precision, speed of rotation, and beam size of the X-rays become important parameters by which to judge products. Benchtop XRD can be targeted for single crystal diffraction for imaging lattices; powder diffraction for phase determination; identifying unfamiliar substances for use in inspection, crystallography, and pharmaceutical research correlating crystal structures with drug efficacy. X-ray generators can reach 18 KW in power and detectors typically come as compound silicon arrays, Peltier-Cooled, Silicon Drift, or Scintillation Counter variants. Software targeted for specific XRD applications is available for upgrade in some analyzer models.
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| Company | Malvern Panalytical | Malvern Panalytical |
| Item | Empyrean X-ray Diffraction System | Crystal Orientation Wafer XRD 300 - Automated Wafer Quality Control |
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| Catalog Number | Empyrean | Wafer XRD 300 |
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| X-Ray Generator | 4 kW generator supporting all current and future X-ray tubes | Inquire |
| Goniometer Type | Vertical goniometer, available in theta-theta or alpha-1 geometry | Inquire |
| Detector(s) | Proportional counter, Scintillation detector, PIXcel1D, PIXcel3D, GaliPIX3D | Inquire |
| Description | With the 3rd generation Empyrean, Malvern Panalytical has now redefined the concept of a multipurpose diffractometer: our newly designed MultiCore Optics enable the largest variety of measurements without any manual intervention. Empyrean has the unique ability to measure all sample types - from With the 3rd generation Empyrean, Malvern Panalytical has now redefined the concept of a multipurpose diffractometer: our newly designed MultiCore Optics enable the largest variety of measurements without any manual intervention. Empyrean has the unique ability to measure all sample types - from powders to thin films, from nanomaterials to solid objects - on a single instrument. The world of materials science is constantly changing and the life of a high performance diffractometer is much longer than the typical horizon of any research project. With Empyrean, you are ready for anything the future holds.
Empyrean is the only platform that does it all, delivering the best data quality on every sample types. It covers the largest set of X-ray diffraction, scattering and imaging applications in one single instrument. Moreover, Empyrean not only meets the high expectations of scientists and XRD experts today, but will continue to do so as research themes evolve Empyrean is ideal for teaching purposes, thanks to the large doors that open completely, allowing access to the system to several people; but at the same time is perfect to perform measurements in demanding R&D environments in several industries.
Features: - Highest data quality on every sample
- Multipurpose and future proof
- Hybrid PIXel technologies
- MultiCore Optics
- PreFIX
- Good laboratory practice
- Customized solutions for X-ray diffraction
... Read More | Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features and Benefits - Ultra-fast precision with our proprietary scan technology
The used method requires only one rotational scan to gather all the necessary data to fully determine the crystal orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
- Fully automated handling and sorting
Wafer XRD 300 is designed to maximize your throughput and productivity. Full integration into your handling and sorting automation makes it a powerful and efficient addition to your process.
- Easy connectivity
Wafer XRD 300’s powerful automation fits easily into your new or existing process, as it is compatible with both MES and SECS/GEM interfaces.
- High precision, deeper insight
Understand your materials like never before with Wafer XRD 300’s key measurements including:
-Crystal orientation
-Notch position, depth, and opening angle
-Diameter
-Flat position and length
-Further sensors available on request
The typical standard deviation tilt (example: Si 100) for the Azimuthal-scan is <0.003o.
- Powerful and versatile
As semiconductor research evolves, it has never been more important to measure a variety of samples. Wafer XRD 300 makes analysis easy and fast for hundreds of materials, including:
-Si
-SiC
-AlN
-Al2O3 (sapphire)
-GaAs
-Quartz
-LiNbO3
-BBO
... Read More |
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