X-ray diffraction (XRD) allows one to ascertain the molecular structure of a crystalline material by diffracting X-rays through the sample. An XRD analyzer obtains interference patterns reflecting lattice structures by varying the angle of incidence of the X-ray beam. Thus, the precision, speed of rotation, and beam size of the X-rays become important parameters by which to judge products. Benchtop XRD can be targeted for single crystal diffraction for imaging lattices; powder diffraction for phase determination; identifying unfamiliar substances for use in inspection, crystallography, and pharmaceutical research correlating crystal structures with drug efficacy. X-ray generators can reach 18 KW in power and detectors typically come as compound silicon arrays, Peltier-Cooled, Silicon Drift, or Scintillation Counter variants. Software targeted for specific XRD applications is available for upgrade in some analyzer models.
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| Company | Malvern Panalytical | Malvern Panalytical |
| Item | X'Pert3 MRD XL Materials Research X-ray Diffraction System | Crystal Orientation Omega/Theta - X-Ray Diffractometer |
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| Catalog Number | X'Pert3 MRD XL | Omega/Theta XRD |
| Price | | |
| X-Ray Tube | Empyrean X-ray tube, choice of anodes: Cu, Co, Cr, Mo, Ag | Standard X-ray tube, Cu anode |
| X-Ray Generator | 3 kW generator supporting all current and future X-ray tubes | Standard X-ray tube, Cu anode |
| Goniometer Type | High resolution, with Heidenhain encoders | Inquire |
| Detector(s) | PIXcel3D 3D Detection System, X'Celerator, Xenon Proportional Detector | Scintillation counter (single or double) |
| Description | The X’Pert3 MRD-XL Materials Research Diffractometer is the system of choice for high resolution diffraction and scattering analysis of wafers up to 300mm in diameter. It handles a wide variety of X-ray scattering methods, including high resolution diffraction, in-plane diffraction, reflectivity, The X’Pert3 MRD-XL Materials Research Diffractometer is the system of choice for high resolution diffraction and scattering analysis of wafers up to 300mm in diameter. It handles a wide variety of X-ray scattering methods, including high resolution diffraction, in-plane diffraction, reflectivity, thin film phase analysis, wafer mapping, GISAXS, stress, texture and nonambient analysis. The X’Pert3 MRD features the highest resolution goniometer with Heidenhain encoders for lightening fast positioning, a 5 axis cradle allowing for support and mapping of wafers up to 6 inches in diameter, and a wide variety of advanced optics and detectors, including the PIXcel3D for fast reciprocal space mapping. The X’Pert3 MRD-XL also offers a sophisticated, automatic wafer loader option that enables the X'Pert3 MRD XL to function as an 'in-wall' system, with the wafer being loaded from a clean room environment and placed on to a self-centered wafer holder.... Read More | The Omega/Theta XRD is your reliable future-proof partner for determining crystal orientation in the changeable semiconductor landscape. Market-leading precision, blazing-fast measurement speed, and high-end build quality are combined with the power of automation – making sure your processes are The Omega/Theta XRD is your reliable future-proof partner for determining crystal orientation in the changeable semiconductor landscape. Market-leading precision, blazing-fast measurement speed, and high-end build quality are combined with the power of automation – making sure your processes are ready for anything. Offering unparalleled efficiency and precision for crystal orientation and alignment, the Omega/Theta XRD is ideally suited to both production and research applications.
Features and Benefits - Ultra-fast precision with proprietary scan technology
Our method requires only one measuring circle to gather all the necessary data to fully determine the orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
- Easy interfacing for advanced connectivity & automated measurements
All measurements on the Omega/Theta XRD are automated and are managed from within the user-friendly XRD software. The instrument can be easily integrated into existing processes in production environments using its various MES, SECS/GEM, and similar interfaces.
- Characterize a range of materials
Omega/Theta XRD can be used to characterize all single crystalline materials. Commonly used materials are:
-Si
-Ge
-SiC
-AIN
-GaN
-GaAs
-Quartz
-LiNbO3
-CdTe
-BBO
- Convenient, flexible sample handling
Our wide range of accessories enhances the productivity of the Omega/Theta XRD in a wide range of applications from seed boring to grinding, to slicing all the way to wafer geometry end control – keeping you flexible even if those needs change over time. Add-ons include:
-Automatic X-Y mapping stage to map crystal orientation or surface distortions on a user-defined grid
-Stacking stage to align ingots before sawing
-Rocking curve tool for quality measurement
-Additional sample rotation axis
-Photographic camera and image processing
-Laser scanner for sample shape measurement
-Sample adjustment equipment
-There are many more custom engineering solutions!
With customized sample-holders to meet any need from large ingots to tiny cylinders, the Omega/Theta XRD can accommodate a wide range of sample sizes – ensuring that it is equally at home in a production workflow as in research.
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