X-ray diffraction (XRD) allows one to ascertain the molecular structure of a crystalline material by diffracting X-rays through the sample. An XRD analyzer obtains interference patterns reflecting lattice structures by varying the angle of incidence of the X-ray beam. Thus, the precision, speed of rotation, and beam size of the X-rays become important parameters by which to judge products. Benchtop XRD can be targeted for single crystal diffraction for imaging lattices; powder diffraction for phase determination; identifying unfamiliar substances for use in inspection, crystallography, and pharmaceutical research correlating crystal structures with drug efficacy. X-ray generators can reach 18 KW in power and detectors typically come as compound silicon arrays, Peltier-Cooled, Silicon Drift, or Scintillation Counter variants. Software targeted for specific XRD applications is available for upgrade in some analyzer models.
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| Company | Malvern Panalytical | Malvern Panalytical |
| Item | X'Pert3 MRD XL Materials Research X-ray Diffraction System | Crystal Orientation Wafer XRD 300 - Automated Wafer Quality Control |
| Citations | | |
| Catalog Number | X'Pert3 MRD XL | Wafer XRD 300 |
| Price | | |
| X-Ray Tube | Empyrean X-ray tube, choice of anodes: Cu, Co, Cr, Mo, Ag | Inquire |
| X-Ray Generator | 3 kW generator supporting all current and future X-ray tubes | Inquire |
| Goniometer Type | High resolution, with Heidenhain encoders | Inquire |
| Detector(s) | PIXcel3D 3D Detection System, X'Celerator, Xenon Proportional Detector | Inquire |
| Description | The X’Pert3 MRD-XL Materials Research Diffractometer is the system of choice for high resolution diffraction and scattering analysis of wafers up to 300mm in diameter. It handles a wide variety of X-ray scattering methods, including high resolution diffraction, in-plane diffraction, reflectivity, The X’Pert3 MRD-XL Materials Research Diffractometer is the system of choice for high resolution diffraction and scattering analysis of wafers up to 300mm in diameter. It handles a wide variety of X-ray scattering methods, including high resolution diffraction, in-plane diffraction, reflectivity, thin film phase analysis, wafer mapping, GISAXS, stress, texture and nonambient analysis. The X’Pert3 MRD features the highest resolution goniometer with Heidenhain encoders for lightening fast positioning, a 5 axis cradle allowing for support and mapping of wafers up to 6 inches in diameter, and a wide variety of advanced optics and detectors, including the PIXcel3D for fast reciprocal space mapping. The X’Pert3 MRD-XL also offers a sophisticated, automatic wafer loader option that enables the X'Pert3 MRD XL to function as an 'in-wall' system, with the wafer being loaded from a clean room environment and placed on to a self-centered wafer holder.... Read More | Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features Meet the Wafer XRD 300: your high-speed X-ray diffraction module for 300mm wafer production providing key data on a variety of essential parameters such as crystal orientation and geometric features like notches, flats, and much more – designed to fit seamlessly into your process line.
Features and Benefits - Ultra-fast precision with our proprietary scan technology
The used method requires only one rotational scan to gather all the necessary data to fully determine the crystal orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
- Fully automated handling and sorting
Wafer XRD 300 is designed to maximize your throughput and productivity. Full integration into your handling and sorting automation makes it a powerful and efficient addition to your process.
- Easy connectivity
Wafer XRD 300’s powerful automation fits easily into your new or existing process, as it is compatible with both MES and SECS/GEM interfaces.
- High precision, deeper insight
Understand your materials like never before with Wafer XRD 300’s key measurements including:
-Crystal orientation
-Notch position, depth, and opening angle
-Diameter
-Flat position and length
-Further sensors available on request
The typical standard deviation tilt (example: Si 100) for the Azimuthal-scan is <0.003o.
- Powerful and versatile
As semiconductor research evolves, it has never been more important to measure a variety of samples. Wafer XRD 300 makes analysis easy and fast for hundreds of materials, including:
-Si
-SiC
-AlN
-Al2O3 (sapphire)
-GaAs
-Quartz
-LiNbO3
-BBO
... Read More |
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