JAMP-9510F Field Emission Auger Microprobe from JEOL USA Inc.

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JAMP-9510F Field Emission Auger Microprobe

Description

The JAMP-9510F Field Emission Auger Microprobe offers the highest spatial resolution available in an Auger microprobe: (min. probe diameter of 3nm SEI; 8nm for Auger analysis). Employing a low-aberration condenser lens (in which an electrostatic field and a magnetic field are superposed), combined with a patented 'in-lens' Schottky field emission gun, the JAMP-9510F obtains very small spot sizes with beam currents up to 200nA.