Description
The microCMA (Cylindrical Mirror Analyzer) represents the latest advancement in Auger Electron Spectroscopy. Compact and affordable, the microCMA opens up a whole new world of AES applications including ALD, TPD, and MBE.
Features
- Compact: Fits on a 2.75” (70 mm) flange.
- Proven Design: The second order focusing of the CMA provides superior transmission
and resolution.
- Easy to Use: With a USB interface, the control and data massage software interface is
as simple to use as an RGA – point and click.
- Powerful: Auger Electron Spectroscopy is a powerful surface-sensitive technique that
provides quantitative information on the first few monolayers of your sample.
Applications
The microCMA is a non-scanning (imaging) cylindrical mirror analyzer designed for the many applications for AES that do not require scanning (imaging) capability.
Those applications include analysis of:
- Thin film composition
- Passive oxide thicknesses in semiconductors and metals
- Metal component thermal oxides
- Integrated circuit contamination
- Characterization of sputtered layers
- Auger depth profiles of deposited layers
- Quantization of light element surface films