Description
The NanoScan Lab is a versatile tool for surface analysis on the nanoscale. It provides a wide range of options, such as Auger electron microscopy and spectroscopy (SAM, AES), depth profiling, SEM with Polarization Analysis (SEMPA), focussed ion beam milling (FIB), X-ray photoelectron spectroscopy (XPS), e-beam lithography (EBL), and energy-dispersive X-ray spectroscopy (EDX).